| Process gas components | Valve for process gas | LGD |
| Air operated valve | AGD | |
| Manual valve for process gas | OGD | |
| MGD | ||
| MGD10V | ||
| OGD10V | ||
| OGD20V | ||
| Air operated valve for process gas | AGD※※V | |
| AGD11 | ||
| AGD12 | ||
| Vacuum burst valve | FGL | |
| Vacuum generator | VG | |
| Regulator for process gas | PGM |
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